Villains who are deities (gods), and villains who become deities in the course of the story. These are some of the most powerful villains of all due to their nature, and (usually) cannot be beaten unless by another deity or with magical weapons.
Beerus
Ammit (Marvel Cinematic Universe)
Ares (DC)
Shinnok
Odin (God of War)
Loki (Marvel)
God (Supernatural)
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